Manufacturing
The manufacture of modules from crystalline silicon cells requires a number of process steps and different production technologies. While the manufacture of thin-film modules is a continuous process in which physical deposition techniques (sputtering, vapor deposition) dominate.
From the crystalline silicon cell to the module
Crystalline silicon cells are manufactured from razor-thin slices of silicon (wafers) that are either monocrystalline (c-Si) or multicrystalline (mc-Si, often also known as polycrystalline).
The manufacturing process comprises ten steps. In a first step, the metallurgical-grade silicon (purity 98 to 99 percent) is converted into polysilicon (solar grade silicon) with a purity of up to 99.999999 percent. An even higher level of purity (99.9999999 percent) is needed for high-performance cells. The predominant production method is the Siemens process. In this process, the metallurgical-grade silicon is first converted into trichlorosilane using gaseous hydrogen chloride. After a number of distillation stages, the trichlorosilane is reduced thermally under hydrogen into polycrystalline silicon and gases containing chlorine by a CVD (Chemical Vapor Deposition) process. The silicon here deposits onto high-purity silicon rods that are held at approximately 1,500 °C. This leaves extra-pure polycrystalline silicon, which is cooled and crushed for further processing.
Production of the ingots
To permit the production of wafers, the solar grade silicon is first crystallized into blocks or ingots. Often boron is added to the silicon at this early processing stage, causing p-doping of the crystal structure.
Crystal growing, i.e. the synthetic production of monocrystals, is required for the production of monocrystalline ingots. Two methods have been proved in practice:
- In the Czochralski process, the silicon crystal is pulled from a crucible containing molten polycrystalline silicon. The starting point for crystallization is a monocrystalline silicon seed crystal that is immersed in the melt and onto which the silicon atoms deposit themselves in a regular pattern. The seed’s rod is slowly pulled upwards and rotated simultaneously so that a cylindrical monocrystal of around 30 cm diameter is extracted. This ingot can be several meters long.
- The zone melting process allows crystallization with simultaneous purification. A polycrystalline silicon rod is induction-heated to melting point at one end, i.e. a powerful current is induced in the inner core of the rod that heats the material to its melting point. The narrow melt zone travels along the length of the rod so that the material behind the molten zone resolidifies. As the melting point of the impurities differs from that of the silicon, the phase change from molten to solidified separates the impurities from the silicon. The impurities accumulate in the melt and are transported to the end of the rod as the molten zone travels through the rod so that they can be cut off after the end has solidified.
The process resolves the problem by slowly lowering a polycrystalline silicon rod with a monocrystalline silicon seed crystal at the tip through an annular coil. The coil generates a high-frequency electromagnetic field so that the rod heats up from the tip. As the rod cools down behind the molten zone, which travels slowly through the rod from the bottom to the top, a high-purity monocrystalline silicon structure is formed. This allows the production of extremely highly efficient solar cells from this ingot.
For the production of multicrystalline ingots, polysilicon is melted in the ingot casting process and poured into a cuboid crucible. The cast ingot solidifies uniformly in one direction because of this controlled heating and cooling. This directional solidification causes homogeneous silicon crystals to form. The grain sizes range from a few millimeters to several centimeters. Continuous casting, which permits a continuous production process, is an alternative to ingot casting. The Bridgman process is a further development. The lowest layer of the silicon is melted in the crucible. The heating zone then travels upwards while the material solidifies from the bottom upwards. This allows the production of larger multicrystalline ingots.
The ingots are then sliced into wafers with wire saws under a slurry which rinses the saw wire. The silicon carbide particles in the slurry are actually responsible for the sawing process.
The ribbon-growing method was developed to eliminate the sawing step, which is associated with significant loss of material. Two methods may be used to produce multicrystalline silicon ribbons.
- The EFG process (Edge-defined Film-fed Growth process) generates an octagonal, several meters long, hollow cylinder of multicrystalline silicon. An octagonal shaping graphite substrate is immersed in the silicon melt and slowly pulled upwards. The surface tension of the liquid silicon causes a skin to form on the underside of the substrate and slowly solidify. Growth is continuous. A laser then cuts the octagonal cylinder into slices which for their part are cut into eight wafers with an edge length of 10 to 13 cm each. The EFG process requires around 30 percent less silicon than the sawing method.
- The string-ribbon process uses carbon or quartz fibers (strings) as seeds for crystallization. The strings are drawn from bottom to top through a flat crucible containing the silicon melt. Silicon is continuously added to the crucible while the rectangular wafers are continuously cut from the growing ribbon.
From the wafer to the solar cell
A multiple stage process is required to transform the around 180 µm thick wafers into solar cells. First, the saw damage is removed by wet chemical etching. It is possible to roughen up the surface of the wafer at the same time in this step, to increase the absorption of sunlight. The wafers are cleaned in a wet chemical process after etching and then dried.
The silicon structure is then dosed with phosphorus (n-doping). The wafers are exposed to a gas containing phosphorus in a diffusion furnace at around 900 °C in oxygen, which leads to the formation of an oxide with phosphorus on the surface. Phosphorus atoms diffuse from this layer into the silicon structure so that the front side of the wafer is formed into an emitter across its entire surface. The depth to which the phosphorus atoms penetrate depends in particular on the temperature and the duration of diffusion.
Then the phosphorus glass (phosphorus silicate) created on the surface is removed by a wet chemical treatment.
To increase sunlight absorption and to improve the electrical properties of the surfaces and the base material, an anti-reflection coating (silicon nitride) is applied to the front side of the wafer. Plasma enhanced chemical vapor deposition (PECVD) has proved itself the most effective method.
Extremely narrow conductors (contact fingers) are then screen-printed onto the front side of the wafer using a silver paste and two or three wider tracks (busbars) perpendicular to these through which the charge carriers can be removed. Busbars are printed on the rear side with a silver/aluminum paste. The wafer is dried in a special furnace after each print process. Finally, the contacts are fired to create an electrical connection with the silicon.
The grid and the busbars inevitably cover a proportion of the cell surface, which reduces light absorption. For this reason, rear-side contacts are gaining in importance.
Eight to twelve solar cells are joined to form a string, connected with one another by soldered contact ribbons and thereby connected electrically in series. The strings are then soldered to one another. A number of strings (generally six) form a module which consequently consists of 48 to 96 cells, as a rule.
The soldered solar cells are embedded in plastic film – either of ethyl vinyl acetate (EVA) or of polyvinyl butyral (PVB) – and encased between a glass plate on the front side and a weather-resistant plastic film (usually Tedlar) on the rear side. The rear side may also consist of a glass plate. Only highly transparent, anti-reflection coated or structured glass is used for the front sheet of glass.
The complete sandwich is then baked in a laminator in a vacuum and at a temperature of around 140 °C. The important point here is to heat the entire module surface up uniformly and rapidly. The crystalline module is finally sealed at the edges with tape, an aluminum frame with silicon sealant and a junction box is fitted on the rear side.
Manufacture of thin-film modules
There are several types of thin-film modules available in the market, principally differing by the photoelectrically active material. Once the films have been applied, the material is cut into individual cells by a laser beam. It is this monolithic connection which actually creates the module. The method is not expensive to automate and the production process is adaptable.
The front side of the thin-film modules consists of special highly transparent and anti-reflection-coated glass while the rear side is either glass or a weatherproof plastic. The production process is always completed by mounting the junction box on the rear side. The three most important thin-film technologies will be described below.
Amorphous and microcrystalline silicon (a-Si/c-Si): A transparent conductive film (transparent conductive oxide, TCO) is deposited on a substrate of glass, metal, or plastic by sputtering or by low pressure chemical vapor deposition (LPCVD). This film is generally zinc oxide dosed with boron.
The amorphous (a-Si) and microcrystalline (c-Si) silicon films are vapor-deposited in sequence. The method used is plasma-enhanced chemical vapor deposition (PECVD). Finally, a further TCO film is applied.
Cadmium telluride (CdTe): First, a TCO film is applied to the front glass plate, then cadmium sulfide (CdS) is vapor-deposited as a buffer film, followed by cadmium telluride as the photoactive semiconductor. The quality of the CdTe absorber coating is enhanced by a wet chemical treatment with cadmium chloride (CdCl2). The p-n junction is formed at the boundary layer between the CdS and the CdTe. A combination of antimony telluride (Sb2Te3) and molybdenum (Mo) is used as a metallic rear-side contact.
An integrated series circuit of individual cells is created by specific cuts following TCO, CdTe, and rear-side contact deposition. The CdTe module is laminated with a sealing film and a second glass plate.
CIS and CIGS: The production of thin-film modules from copper indium gallium selenide or copper indium gallium sulfite (CIGS) and from copper indium selenide or copper indium sulfite (CIS) begins by coating the glass substrate with molybdenum to create a rear-side contact. This is done by sputtering. The p-type CIS or CIGS absorber coating is produced either by vapor deposition onto the heated substrate or in a multistage process in which first copper and indium are deposited onto the unheated substrate. Selenization or sulfurization follows in a subsequent step known as baking.
A CdS buffer film and a ZnO film create the p-n junction. At the same time, the zinc oxide forms the transparent front contact (TCO film). The CdS buffer film is generally deposited in a chemical bath and the front contact is created by cathode evaporation (sputtering).
Approaches for improvements
The production technique employed in thin-film solar cells benefits hugely from the knowledge accumulated over the years in the application of coatings to architectural glass and in the production of displays. It is possible to coat glass plates up to 3.2 × 6 m2 = 19.2 m2 within 35 seconds. This corresponds to a coating speed of 33m2/minute.
The larger the size of the unit produced, the lower the costs of industrial coating technologies. The aim is to exploit this scaling effect for photovoltaics. Coating methods have been developed for the photovoltaics industry that are capable of producing substrates of 5.7 m2. The first production lines came on stream in 2008, but it has not yet been possible to achieve the hoped-for reductions in production costs.
The challenge is to achieve two improvements at once: First, to increase productivity by reducing material costs, increasing plant throughput (process speed) and improving plant availability (automation).
Secondly, to increase the conversion efficiency by minimizing optical losses (light traps), improved exploitation of the solar spectrum and finally by reducing the electrical losses.
Only if the rate of learning in fundamental research is sustained over the long term will it be possible to push the ratio of minimum cost per electrical output towards the target value of less than 1/W.
Roadmap for cost reductions
The learning curve resulting from empirical studies conducted over the past few decades shows that when cumulative production volumes double, PV module manufacturing costs drop by between 17 and 26 percent (learning rate).
Silicon is the most thoroughly investigated semiconductor, and crystalline silicon continues to hold sway in photovoltaics. Efforts to reduce costs therefore currently center on this material.
The success story of crystalline silicon photovoltaics is reflected in the fast pace at which module prices have plummeted. Over the past 34 years, the levelized costs of electricity have fallen by an average ten percent each year. Thanks to technological development, price reductions continue to occur and are accelerated where possible. Now, the manufacturing process must be simplified, material consumption decreased, and module efficiency must rise.
What this means for photovoltaics is that the development costs for new processes and machines must be shared among competitors, who all follow a widely recognized “roadmap”. This roadmap stipulates a path for further development and favors the evolutionary development of technology typically employed in the successes achieved to date with crystalline silicon photovoltaics.
In its “International Technology Roadmap for Photovoltaics” (ITRPV), the association SEMI (Semiconductor Equipment and Materials International) sets out the most important steps towards the desired cost reductions over a period of ten years.
In a scenario for the period from 2010 to 2020, the ITRPV calculates an annual industrial growth rate of 35 percent and a learning rate of 20 percent. This yields a yearly cost reduction of between eight and nine percent, depending on the quantity of modules produced. If we look at this with regard to output, the reduction in costs is even greater (nine to ten percent), as module efficiency is set to increase.
Manufacturing costs and efficiency are the two factors which ensure that module costs fall dramatically. It is foreseeable, however, that manufacturing costs will be the dominating factor over the next decade and beyond.
Conserving materials
The cost of materials is a crucial issue in module production which is why cost reductions here can have a huge knock-on effect. Polysilicon, in particular, needs to become considerably cheaper. The roadmap anticipates price cuts of 50 percent by 2020. In addition, the proportion of silicon required to generate one watt of power should drop in stages from 7 g/W today to 6 g/W in 2012 and 5.5 g/W in 2015.
Wafer thickness is another aspect which has a big influence on cost. In an effort to decrease material costs, ever thinner wafers are being sawed from the ingots. A wafer thickness of 180 mm is currently standard in mass production, and it is likely that thicknesses as low as 100 mm will be reached by 2020.
With increasing thinness, the wafers also become more sensitive. It is therefore important, when cutting ingots into increasingly thin wafers, to optimize the process steps that take these wafers to the finished module.
Conveyance, wiring, lamination, and all other production steps must be extremely swift, but at the same time so gentle that the thin silicon discs do not break. A high breakage rate can cancel out any advantage gained by conserving material.
The biggest cost component of sawing ingots into wafers is the fluid (slurry) which rinses the saw wire. Noticeable costs savings could be achieved if recycling the slurry could be made cheaper and thinner wires could be used for sawing.
The metallization pastes needed to apply the electrical contacts are also expensive, with silver and aluminum driving the costs highest. In order to lower the proportion of silver required per cell from the current quantity of 0.30 g to 0.02 g by 2020, the first step is to reduce the total amount of paste needed. Then, from around 2015 on, silver will be replaced by another metal (probably copper).
It is not only cost factors that are driving these changes, but also environmental concerns. For example, metallization pastes containing lead should be replaced by lead-free products. These must be available by mid 2012 in order for them to be introduced into mass production by 2013 at the latest.
Optimizing the manufacturing process
Some of the systems used to produce Si wafer solar cells originate from microelectronics manufacturing. They have already been adapted for markedly higher throughputs and the line cycle times last only seconds, making them 30 to 200 times faster than the line cycle times for thin-film solar cells which take minutes. However, there is still room to increase throughput and lower costs even further.
One option is to use larger ingots. The roadmap announced that the mass of a monocrystalline ingot will rise from around 150 kg at present to approximately 300 kg over the next ten years. The multicrystalline ingots that today weigh around 400 kg will then weigh more than one metric ton.
Within the same period, it will also be necessary to improve the productivity of tools by increasing the yield and throughput of production lines. This primarily affects the wafer sawing and wafer cleaning production steps where the throughput of each tool could be increased by around 50 percent.
Tool uptime as defined by SEMI standard E10 is another important factor that can be used to optimize production lines. The goal is to attain an uptime of over 96 percent. This is already achieved today in the chemical process steps of cell production, but will not be reached in metallization and classification until 2015.
In order to increase the throughput of the entire production line, front-end (chemical and thermal) and back-end (metallization and classification) processes must be adapted to one another (synchronized).
Currently, the front end is rushing way ahead of the back end. The front end must process 3,600 wafers per hour as a minimum, but at the back end this total is just 3,000 wafers. In ten years, it is to be expected that front-end output will reach at least 7,200 wafers per hour. To close the gap, significantly faster metallization technologies will be employed to enable the back end to match this total.
In order to achieve the target cost reductions, production machinery should have a smaller footprint (45 percent less by 2020) and require fewer staff (minus 60 percent by 2020) while yielding a higher throughput. Moreover, the processes of interconnecting and encapsulating cells must be made quicker. Amongst other things, this will require encapsulation materials that permit shorter processing times.
A surge in throughput rates is to be expected in around 2015 if new interconnection technologies and rear contacting are introduced into mass production.
Increasing efficiency
Several measures are needed to improve the efficiency of cells. These include both reducing recombination losses and increasing emitter sheet resistance. By 2015, it will be possible to make the width of front contacts distinctly smaller by using new technology in the metallization process. At around the same time, silver printing will be superseded by copper plating, resulting in further cost reductions.
The key objective is to extract as much output as possible from the interconnected cells. A good yardstick for this is the module-to-cell power ratio. This value is currently 97.5 percent for multicrystalline, and 96 percent for monocrystalline silicon. By introducing anti-reflective glass into module production, it will be possible to improve these values by around 1.5 percentage points from 2013. Two years later, new interconnection and encapsulation technologies will increase them by a further percentage point, meaning that in principle a ratio of 100 percent will be achieved.
Over the next few years, the efficiency of multicrystalline cells is set to rise dramatically, allowing them to keep pace with developments in monocrystalline cells. It is anticipated that the 20-percent limit will be reached in 2020. This can be attributed in part to the fact that rear-contact cells will increasingly gain acceptance. The proportion of these cells on the market will soar from 2014 onward and will reach 40 percent by 2020.
Furthermore, statistical process control (SPC) is necessary to continually improve all manufacturing steps. This detects all the errors in individual process stages and assesses their impact on the subsequent process steps. Productivity can thus be increased even further by performing these checks.
The laser as an all-purpose tool
Laser processing plays an important role in PV production. As such, it has become an all-purpose tool: Today, cutting, labeling and marking, edge ablation and interconnection are all tasks assigned to the laser. Laser beams can create openings both directly from the rear side and through the substrate in order to interconnect (structure) the layers.
The first high-efficiency solar cell concept to be implemented on an industrial scale, the buried contact solar cell developed at UNSW, Sydney, uses grooves cut into the front side of the cell. They are formed by means of laser ablation (the process of removing material from a surface by irradiating it with a laser beam) followed by chemical etching of the silicon. The front-side metallization on the solar cells is then applied (or “buried”) by electroplating. The metal-filled grooves are so thin and deep that the light collection area is enlarged and the electrical resistance of the conductors is kept low.
Special methods and processes
The successes achieved with laser technology in PV production have led to the development of many additional processes.
Laser-fired contacts: When connecting solar cells, there is always a tradeoff between applying metal contacts with low electrical resistance and minimizing the interface between the semiconductor and the metal, as this is where high losses are caused by the light-generated charge carriers. With conventional, full-area, screen-printed rear-side metallization, the full efficiency potential of the cell is not exploited owing to the large metallized area. The contact surface can be reduced without greatly increasing the electrical resistance. The metal-semiconductor interface can be neatly minimized using “laser-fired contacts” (LFC). Here, the metal is driven (“fired”) through an insulating layer using a local laser pulse.
Drilling and surface structuring: In order to improve absorption, front-side metal contacts should be avoided although it is sensible to arrange the n-conducting emitter zone on the front side. To contact this zone via rear-side metal fingers, emitter-type connection channels between the front and rear sides are required, which are created by drilling fine holes through the solar cell. This is best done by laser drilling. Disk lasers can drill up to 3,000 holes through silicon wafers in just one second, allowing the preparation of these advantageous connection channels at a high throughput rate.
Doping: Lasers can also be used to dope the cells locally. This is necessary, for example, to selectively lower the contact resistance between the cell surface and the contact fingers, to allow the charge carriers to flow away without losses. The concentration of phosphorus atoms in the n-doped layer is therefore increased precisely where the contact fingers will later be printed (selective emitter). For this purpose, a liquid film containing phosphorus is applied to the silicon wafer and driven into the silicon by applying energy (a laser).
Removing insulating layers: In order to prevent the light-generated charge carriers from recombining, the surface of the cell is passivated. This can be done by means of depositing a dielectric layer onto it. Oxidized silicon surfaces and surfaces coated with silicon nitride have particularly good passivation properties. However, in both cases, the silicon is hidden under an insulating layer which must be removed in order to contact the solar cell. The use of “short pulse lasers” for this purpose is currently being trialed. If the insulating layer (silicon oxide/silicon nitride) is removed by short laser pulses, the substrate below has no time to heat up or conduct the heat down into the cell. The impact of the energy input, which results in material being blasted off the surface, is thus limited to the layers close to the surface, and damage to the deep levels of the silicon is avoided. This type of processing is particularly gentle and is ideally suited to producing local contact openings.
Soldering on laminating film: The process of connecting cells to form a complete module can also be improved by using lasers, and several complex handling steps can be eliminated. “On-laminate laser soldering”, a recent technology, has the advantage that the cells are not soldered together until they are positioned on the module laminating film. The success of this method depends on precise process control in order to reduce the heat input of the laser to a minimum and avoid damage to the sensitive laminating films.
Laser technology advantages and outlook
The range of interesting possibilities offered by laser technology assists in developing new cell concepts. The most important advantages are:
- alternatives to photolithography that can be implemented on an industrial scale
- high speed (ten thousand holes can be made in wafers in seconds)
- contact-free wafer processing
- minimal heat input
Processes where laser beams are applied to only a small proportion of the surface stand a particularly good chance of gaining wide acceptance in future.
New beam sources with ever higher repetition rates and capabilities are being launched onto the laser market. In addition, new possibilities for beam shaping and beam guidance are continually being created. This will enable the structuring of large solar cell surface areas to be performed cheaply in industrial-scale production.
Upgraded Metallurgical-Grade (UMG) Silicon
UMG silicon is increasingly seen as a cost-effective alternative to the highly pure solar-grade silicon that is manufactured, for example, in the Siemens process. UMG technology is based on a purification process that that starts with a molten silicon-aluminum solution. The silicon “flakes” that are fabricated in this process can be further processed into cost and energy efficient UMG silicon. The efficiency of the cell is just somewhat lower than that of regular polycrystalline solar cells. The lower breakdown voltage requires special attention.































