engineering the solar age - Suppliers for Photovoltaics

Process power for stable film deposition processes in solar cell production

Cell efficiency is the key factor for the characterization of solar cells. Homogeneous TCO front contacts and highly conductive metal back contacts significantly influence cell efficiency.

HÜTTINGER Elektronik offers a broad range of direct current, mid and high frequency process power supplies, which allow for high levels of plasma control. This results in very good homogeneity and reproducibility of deposited film thickness and structure.

Typical film deposition processes in solar cell production are PECVD processes for photo-active a-Si/?c-Si layers and magnetron sputtering processes for TCO layers. HÜTTINGER’s innovative power supplies contribute to both of these: The high frequency generators of the TruPlasma RF Series 1000 provide exceptional output stability and operational reliability in PECVD processes. Available with one, two or three kW of output power and an energy conversion efficiency of more than 80%, the generators account for an optimum use in each process step. Thus, TruPlasma RF Series 1000 provides new possibilities for production cost reductions and continuous production at highest throughput rates.

For demanding sputtering processes the TruPlasma DC Series 3000 is the right solution. This product family boasts HÜTTINGER’s highly sophisticated arc management system, CompensateLine. It allows for a dramatic reduction of the residual arc energy and ensures optimum results with regard to layer quality and deposition rate. As a result, CompensateLine enables exceptional, high-quality and homogeneous films in highly arcing processes, such as TCO processes.

In addition to power supplies for plasma deposition processes, HÜTTINGER’s product portfolio includes generators for zone float processes in the production of solar-grade silicon stock material. At high power and high efficiency, they enable users to produce solar-grade silicon wafers at low cost levels. Therefore HÜTTINGER helps reach grid parity a little sooner.

As a member of the TRUMPF Group since 1990, HÜTTINGER Elektronik possesses a broad service network all over the world. Whether in Europe, Asia or America, HÜTTINGER offers its customers worldwide comprehensive support.